Research Grant
[Cite as https://purl.org/au-research/grants/arc/DP0208814]Researchers: Dr Mark Ridgway (Chief Investigator) , Prof Harry Bernas (Partner Investigator)
Brief description Nanocavities in Si - Structural Evolution and Metal Gettering. Nanocavities represent a novel means of minimising metallic contamination in the active region of Si microelectronic devices. We propose innovative experiments, using in-situ transmission electron microscopy and synchrotron-based x-ray methods, to achieve a fundamental understanding of the processes that govern nanocavity structural evolution and metallic impurity trapping. We seek to develop a patentable technology to enhance impurity trapping efficiency and thus dramatically increase the applicability of this industrially-relevant process.
Funding Amount $183,000
Funding Scheme Discovery Projects
- PURL : https://purl.org/au-research/grants/arc/DP0208814
- ARC : DP0208814