FEI Verios XHR SEM

Full description

The Verios XHR SEM is the second generation of FEI's Extreme High Resolution (XHR) SEM family, offering sub-nanometre surface imaging resolution over the full 1 kV to 30 kV operating voltage range with excellent materials contrast, and extraordinary low-voltage performance for extremely precise, surface-specific analysis.

The microscope is equipped with an array of in-lens, in-column, and chamber detectors, bright field, dark field and high angle annular dark field STEM detectors, and 80 mm² Oxford Instruments X-Max SDD EDX detector for microanalysis. Using FEI's MAPS imaging software, automatic acquisition of large images and correlative workflows, for example combining optical microscopy and SEM, are made possible.

This facility was funded through the Australian Research Council (LIEF grant LE130100011), with support from UWA, Murdoch, ECU and the WA Botanic Gardens and Parks Authority.

Techniques

• Secondary electron (SE) imaging
• Backscattered electron (BSE) imaging
• Scanning transmission electron microscopy (STEM), including bright field (BF), dark field (DF) and high angle annular dark field (HAADF) modes
• Energy-dispersive X-ray spectroscopy (EDX) – point mode and mapping (using the AZtec software)
• Automatic acquisition of large images (using the MAPS software)
• Correlative microscopy (using the MAPS software)