grant

Optical profiler with dynamic micro electro-mechanical systems capability [ 2011-03-01 - 2012-12-31 ]

Research Grant

[Cite as http://purl.org/au-research/grants/arc/LE110100024]

Researchers: A/Prof Marie Herberstein (Chief Investigator) ,  A/Prof Michael Withford (Chief Investigator) ,  Adrian Keating (Chief Investigator) ,  Dr Robert Carman (Chief Investigator) ,  Hark Hoe Tan (Chief Investigator)
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Brief description Optical profiler with dynamic micro electro-mechanical systems capability. This facility will allow Australian researchers to access the world's best capability in dynamic, time resolved, optical three-dimensional profiling of surfaces and devices. It will advance a raft of science research and industry applications characterising natural and artificial materials and underpinning next generation optical, photonic and microelectronic devices.

Funding Amount $240,000

Funding Scheme Linkage Infrastructure, Equipment and Facilities

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