High Performance Optical Profilometer for mapping micro/meso/macroscopic topography [ 2007 - 2007 ]

Research Grant

[Cite as]

Researchers Dr A Keating; A/Prof JM Dell; Prof L Faraone; Dr G Parish; A/Prof Y Liu; Prof X Hu; Prof K Alameh; Prof C Jagadish; Mr A Tarr

Brief description Developing advanced, high performance new materials requires an understanding of surfaces and interfaces. Making a small area, low yield material or device is a regular occurrence within the Australian research community. The ability to create reproducible, high yield materials requires greater understanding of the stresses, uniformities and deformations in a material over large areas. The proposed instrument can measure topography over many centimeters-squared with sub-micron spatial resolution, currently beyond the capabilities of researchers in Australia. By providing a quantitative method to measure surface textures, the instrument will also support Australian industries looking for improved process control.

Funding Amount $130,000

Funding Scheme Linkage Infrastructure, Equipment and Facilities

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